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Estimation of the piezoelectric properties of thin AlN layers for MEMS applications, in: 50. IWK - Internationales Wissenschaftliches Kolloquium
Author: Tonisch, Katja; Cimalla, Volker; Foerster, Christian; Dontsov, Denis; Ambacher, Oliver
Published: 2005
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Homodyne interference signal demodulation for nanopositioning and nanomeasuring machines, in: 56. IWK - Internationales Wissenschaftliches Kolloquium
Author: Hausotte, Tino; Percle, Brandon; Gerhardt, Uwe; Dontsov, Denis; Manske, Eberhard; Jäger, Gerd
Published: 2011
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Laserinterferometric Vibrometer for Micro Components, in: 56. IWK - Internationales Wissenschaftliches Kolloquium
Author: Dontsov, Denis; Pöschel, Wolfgang; Langlotz, Enrico; Schott, Walter
Published: 2011
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