Design of an interferometric test station for parallel inspection of MEMS, in: 56. IWK - Internationales Wissenschaftliches Kolloquium

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Author	Schäffel, Christoph; Michael, S.; Paris, R.; Frank, A.; Zeike, N.; Gastinger, K.; Kujawinska, M.; Zeitner, U.; Beer, S.
Published	TU Ilmenau, Ilmenau, 2011
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56. IWK - Internationales Wissenschaftliches Kolloquium | 56. IWK - International Scientific Colloquium
Author: Pufke, Michael; Hilbrunner, Falko; Diethold, Christian; Fröhlich, Thomas; Schalles, Marc; Blumröder, Götz; Augustin, Silke; Mammen, Helge; Irrgang, K.; Meiselbach, U.; Rizzuti, Sergio; Rosa, Raffaele; Tkatchenko, O.; Tkachenko, R.; Hirniak, Y.; Orest, Ivakhiv; Mushenyk, Petro; Böhm, V.; Jentzsch, Alexander; Kaufhold, Tobias; Schneider, F.; Zimmermann, Klaus; Wendt, Gudrun; Ahlers, Franz Josef; [...]
Published: 2011

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56. IWK - Internationales Wissenschaftliches Kolloquium

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DMG-Lib		https://www.dmg-lib.org/dmglib/handler?docum=29452009
Europeana		http://www.europeana.eu/portal/record/2020801/dmglib_handler_docum_29452009.html

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Ilmenau TU

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2011

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Design of an interferometric test station for parallel inspection of MEMS, in: 56. IWK - Internationales Wissenschaftliches Kolloquium

General information