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Klugowski, M.
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variant spelling: Klugowski, M. |
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| Automation, since 1950 |
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Quasi monolithic integration of Silicon-MEMS with piezoelectric actuators for High Speed non-contact Atomic Force Microscopy, in: 56. IWK - Internationales Wissenschaftliches Kolloquium Author: Guliyev, Elshad; Volland, B.E.; Sarov, Y.; Ivanov, Tzv.; Klugowski, M.; Rangelow, I.W.; Manske, Eberhard Published: 2011 |
 DMG-Lib |
 https://www.dmg-lib.org/dmglib/handler?biogr=21342004 |
