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Sarov, Y.

 
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Sarov, Y.
   
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Automation, since 1950
Literature
 
thumbnail of29516009 Quasi monolithic integration of Silicon-MEMS with piezoelectric actuators for High Speed non-contact Atomic Force Microscopy, in: 56. IWK - Internationales Wissenschaftliches Kolloquium
Author: Guliyev, Elshad; Volland, B.E.; Sarov, Y.; Ivanov, Tzv.; Klugowski, M.; Rangelow, I.W.; Manske, Eberhard
Published: 2011
 
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