Fabrication of PolySilicon Microstructures using the PolyMEMS INAOE Technology, in: Final program // Thirteenth World Congress in Mechanism and Machine Science, Micro Electromechanical Systems (MEMS)

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Author	Calleja Arriaga, Wilfrido; Diaz Alonso, D.; Hidalga, J.; Linares, M.; Molina, J.; Quiñones-Novelo, F. J.; Reyes, C.; Rosales, P.; Torres-Jacome, A.; Zuñiga-Islas, C.
Published	Guanajuato, Mexico, 2011
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Micro Electromechanical Systems (MEMS), in: Final program // Thirteenth World Congress in Mechanism and Machine Science
Author: IFToMM - International Federation for the Promotion of Mechanism and Machine Science; Buchacz, Andrzej; Placzek, Marek; Calleja Arriaga, Wilfrido; Diaz Alonso, D.; Hidalga, J.; Linares, M.; Molina, J.; Quiñones-Novelo, F. J.; Reyes, C.; Rosales, P.; Torres-Jacome, A.; Zuñiga-Islas, C.; Wróbel, Andrzej
Published: 2011

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Micro Electromechanical Systems (MEMS)

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DMG-Lib		https://www.dmg-lib.org/dmglib/handler?docum=22640009
Europeana		http://www.europeana.eu/portal/record/2020801/dmglib_handler_docum_22640009.html

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Ilmenau TU

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2011

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Fabrication of PolySilicon Microstructures using the PolyMEMS INAOE Technology, in: Final program // Thirteenth World Congress in Mechanism and Machine Science, Micro Electromechanical Systems (MEMS)

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