Linares, M.


 
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Linares, M.
   
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Automation, since 1950
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thumbnail of22640009 Fabrication of PolySilicon Microstructures using the PolyMEMS INAOE Technology, in: Final program // Thirteenth World Congress in Mechanism and Machine Science, Micro Electromechanical Systems (MEMS)
Author: Calleja Arriaga, Wilfrido; Diaz Alonso, D.; Hidalga, J.; Linares, M.; Molina, J.; Quiñones-Novelo, F. J.; Reyes, C.; Rosales, P.; Torres-Jacome, A.; Zuñiga-Islas, C.
Published: 2011
 
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