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Michael, S.
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Orthographe également utilisé: Michael, S. |
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| Automatisation, depuis 1950 |
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Design of an interferometric test station for parallel inspection of MEMS, in: 56. IWK - Internationales Wissenschaftliches Kolloquium Author: Schäffel, Christoph; Michael, S.; Paris, R.; Frank, A.; Zeike, N.; Gastinger, K.; Kujawinska, M.; Zeitner, U.; Beer, S. Published: 2011 |
 DMG-Lib |
 https://www.dmg-lib.org/dmglib/handler?biogr=21494004 |
